PFAS
Global PFAS Screening Tool
No. of Substances: 18960
trimethylsilyl dihydrogen phosphate
phosphoric acid mono-trimethylsilanyl ester, Silanol,trimethyl-,dihydrogen phosphate, trimethylsilylphosphate, Phosphorsaeure-mono-trimethylsilylester, trimethylsilylpolyphosphate, Trimethyl-phosphonooxy-silan, Trimethylsilyl-hydrogen-phosphat
CAS Number: 7422-66-4
IUPAC name: trimethylsilyl dihydrogen phosphate
Molecular formula: C3H11O4PSi
Molecular weight: 170.17600
InChI: InChI=1S/C3H11O4PSi/c1-9(2,3)7-8(4,5)6/h1-3H3,(H2,4,5,6)
InChIKey: FVCJARXRCUNQQS-UHFFFAOYSA-N
SMILES: C[Si](C)(C)OP(=O)(O)O
EINECS: -
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Substance Information
CAS Number:
7422-66-4
Chemical Name:
trimethylsilyl dihydrogen phosphate
Chinese name:
三甲基硅基二氢化磷酸酯
Date of inquiry :
Apr 10, 2026 17:50:54
Inquiry website:
https://www.chemradar.com/tools/fcmdGCIS inquiry report
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